Novel RF power sensor based on capacitive MEMS technology

Luis J. Fernández; Eelke Visser; Javier Sesé; Henry Jansen; Remco Wiegerink; Jaap Flokstra

Novel RF power sensor based on capacitive MEMS technology

Luis J. Fernández, Eelke Visser, Javier Sesé, Henry Jansen, Remco Wiegerink, Jaap Flokstra

Faculty of Science and Technology

Research output: Contribution to conference › Paper › peer-review

76 Downloads (Pure)

Abstract

We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.

Original language	English
Pages	41-44
Number of pages	4
Publication status	Published - 2 Nov 2003
Event	14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands Duration: 2 Nov 2003 → 4 Nov 2003 Conference number: 14

Conference

Conference	14th MicroMechanics Europe Workshop, MME 2003
Abbreviated title	MME
Country/Territory	Netherlands
City	Delft
Period	2/11/03 → 4/11/03

Keywords

"Through"
Radio frequency (RF)
Power sensor
Capacitance readout
MEMS

Access to Document

Fernandez03capacitiveFinal published version, 5.64 MB

1 Poster

Novel RF power sensor based on capacitive MEMS technology
Fernandez, L. J., Visser, E., Sesé, J., Jansen, H., Wiegerink, R. & Flokstra, J., 2 Nov 2003.
Research output: Contribution to conference › Poster › Other research output

Cite this

@conference{18f222c6663c4afeb651c3e6ef669ef4,

title = "Novel RF power sensor based on capacitive MEMS technology",

abstract = "We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a {"}through{"} power sensor is realized which means that the signal is available during the power detection.",

keywords = "{"}Through{"}, Radio frequency (RF), Power sensor, Capacitance readout, MEMS",

author = "Fern{\'a}ndez, {Luis J.} and Eelke Visser and Javier Ses{\'e} and Henry Jansen and Remco Wiegerink and Jaap Flokstra",

year = "2003",

month = nov,

day = "2",

language = "English",

pages = "41--44",

note = "14th MicroMechanics Europe Workshop, MME 2003, MME ; Conference date: 02-11-2003 Through 04-11-2003",

}

TY - CONF

T1 - Novel RF power sensor based on capacitive MEMS technology

AU - Fernández, Luis J.

AU - Visser, Eelke

AU - Sesé, Javier

AU - Jansen, Henry

AU - Wiegerink, Remco

AU - Flokstra, Jaap

N1 - Conference code: 14

PY - 2003/11/2

Y1 - 2003/11/2

N2 - We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.

AB - We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.

KW - "Through"

KW - Radio frequency (RF)

KW - Power sensor

KW - Capacitance readout

KW - MEMS

M3 - Paper

SP - 41

EP - 44

T2 - 14th MicroMechanics Europe Workshop, MME 2003

Y2 - 2 November 2003 through 4 November 2003

ER -

Novel RF power sensor based on capacitive MEMS technology

Abstract

Conference

Keywords

Access to Document

Fingerprint

Research output

Novel RF power sensor based on capacitive MEMS technology

Cite this