Novel RF power sensor based on capacitive MEMS technology

Luis J. Fernández, Eelke Visser, Javier Sesé, Henry Jansen, Remco Wiegerink, Jaap Flokstra

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We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.
Original languageEnglish
Number of pages4
Publication statusPublished - 2 Nov 2003
Event14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands
Duration: 2 Nov 20034 Nov 2003
Conference number: 14


Conference14th MicroMechanics Europe Workshop, MME 2003
Abbreviated titleMME


  • "Through"
  • Radio frequency (RF)
  • Power sensor
  • Capacitance readout
  • MEMS


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