Novel RF power sensor based on capacitive MEMS technology

Luis J. Fernández, Eelke Visser, Javier Sesé, Henry Jansen, Remco Wiegerink, Jaap Flokstra

Research output: Contribution to conferencePaper

14 Downloads (Pure)

Abstract

We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.
Original languageEnglish
Pages41-44
Number of pages4
Publication statusPublished - 2 Nov 2003
Event14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands
Duration: 2 Nov 20034 Nov 2003
Conference number: 14

Conference

Conference14th MicroMechanics Europe Workshop, MME 2003
Abbreviated titleMME
CountryNetherlands
CityDelft
Period2/11/034/11/03

Keywords

  • "Through"
  • Radio frequency (RF)
  • Power sensor
  • Capacitance readout
  • MEMS

Fingerprint Dive into the research topics of 'Novel RF power sensor based on capacitive MEMS technology'. Together they form a unique fingerprint.

  • Cite this

    Fernández, L. J., Visser, E., Sesé, J., Jansen, H., Wiegerink, R., & Flokstra, J. (2003). Novel RF power sensor based on capacitive MEMS technology. 41-44. Paper presented at 14th MicroMechanics Europe Workshop, MME 2003, Delft, Netherlands.