Novel rf power sensor based on capacitive MEMS technology

L.J. Fernandez, Eelke Visser, J. Sesé, Henricus V. Jansen, Remco J. Wiegerink, Jakob Flokstra

Research output: Contribution to conferencePaperAcademicpeer-review

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Abstract

We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.
Original languageUndefined
Pages41-44
Number of pages4
Publication statusPublished - 2 Nov 2003
Event14th MicroMechanics Europe Workshop 2003 - Delft, Netherlands
Duration: 2 Nov 20034 Nov 2003
Conference number: 14

Conference

Conference14th MicroMechanics Europe Workshop 2003
Abbreviated titleMME 2003
CountryNetherlands
CityDelft
Period2/11/034/11/03

Keywords

  • METIS-212825
  • EWI-19709
  • IR-76164

Cite this

Fernandez, L. J., Visser, E., Sesé, J., Jansen, H. V., Wiegerink, R. J., & Flokstra, J. (2003). Novel rf power sensor based on capacitive MEMS technology. 41-44. Paper presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.
Fernandez, L.J. ; Visser, Eelke ; Sesé, J. ; Jansen, Henricus V. ; Wiegerink, Remco J. ; Flokstra, Jakob. / Novel rf power sensor based on capacitive MEMS technology. Paper presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.4 p.
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month = "11",
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Fernandez, LJ, Visser, E, Sesé, J, Jansen, HV, Wiegerink, RJ & Flokstra, J 2003, 'Novel rf power sensor based on capacitive MEMS technology' Paper presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands, 2/11/03 - 4/11/03, pp. 41-44.

Novel rf power sensor based on capacitive MEMS technology. / Fernandez, L.J.; Visser, Eelke; Sesé, J.; Jansen, Henricus V.; Wiegerink, Remco J.; Flokstra, Jakob.

2003. 41-44 Paper presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.

Research output: Contribution to conferencePaperAcademicpeer-review

TY - CONF

T1 - Novel rf power sensor based on capacitive MEMS technology

AU - Fernandez, L.J.

AU - Visser, Eelke

AU - Sesé, J.

AU - Jansen, Henricus V.

AU - Wiegerink, Remco J.

AU - Flokstra, Jakob

PY - 2003/11/2

Y1 - 2003/11/2

N2 - We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.

AB - We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.

KW - METIS-212825

KW - EWI-19709

KW - IR-76164

M3 - Paper

SP - 41

EP - 44

ER -

Fernandez LJ, Visser E, Sesé J, Jansen HV, Wiegerink RJ, Flokstra J. Novel rf power sensor based on capacitive MEMS technology. 2003. Paper presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.