We present the theory, design, fabrication of and first measurements on a novel power for radio frequency (rf) signals, based on capacitive measurements. The novelty of this sensor is thtat it measures the force that is created between the rf signal and a grounded membrande suspended above the line were the signal is traveling. Deflection of the electrode is measured capapcitively, and the power is then deducted. In this case, a "through" power sensor is realized which means that the signal is available during the power detection.
|Number of pages||4|
|Publication status||Published - 2 Nov 2003|
|Event||14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands|
Duration: 2 Nov 2003 → 4 Nov 2003
Conference number: 14
|Conference||14th MicroMechanics Europe Workshop, MME 2003|
|Period||2/11/03 → 4/11/03|
- Radio frequency (RF)
- Power sensor
- Capacitance readout
Fernández, L. J., Visser, E., Sesé, J., Jansen, H., Wiegerink, R., & Flokstra, J. (2003). Novel RF power sensor based on capacitive MEMS technology. 41-44. Paper presented at 14th MicroMechanics Europe Workshop, MME 2003, Delft, Netherlands.