Nucleation of atomic layer deposited Al2O3 on Si

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 29 Sep 2005
EventMESA+ Day 2005 - University of Twente, Enschede, Netherlands
Duration: 29 Sep 200529 Sep 2005

Conference

ConferenceMESA+ Day 2005
CountryNetherlands
CityEnschede
Period29/09/0529/09/05
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-227217

Cite this