Nucleation of atomic layer deposited Al2O3 on Si

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 29 Sep 2005
EventMESA+ Day 2005 - University of Twente, Enschede, Netherlands
Duration: 29 Sep 200529 Sep 2005

Conference

ConferenceMESA+ Day 2005
CountryNetherlands
CityEnschede
Period29/09/0529/09/05
Other(MESA+ Meeting/Dag)

Keywords

  • METIS-227217

Cite this

Sturm, J. M., Zinine, A., Wormeester, H., & Poelsema, B. (2005). Nucleation of atomic layer deposited Al2O3 on Si. -. Poster session presented at MESA+ Day 2005, Enschede, Netherlands.
Sturm, Jacobus Marinus ; Zinine, A. ; Wormeester, Herbert ; Poelsema, Bene. / Nucleation of atomic layer deposited Al2O3 on Si. Poster session presented at MESA+ Day 2005, Enschede, Netherlands.
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title = "Nucleation of atomic layer deposited Al2O3 on Si",
keywords = "METIS-227217",
author = "Sturm, {Jacobus Marinus} and A. Zinine and Herbert Wormeester and Bene Poelsema",
year = "2005",
month = "9",
day = "29",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 29-09-2005 Through 29-09-2005",

}

Sturm, JM, Zinine, A, Wormeester, H & Poelsema, B 2005, 'Nucleation of atomic layer deposited Al2O3 on Si' MESA+ Day 2005, Enschede, Netherlands, 29/09/05 - 29/09/05, pp. -.

Nucleation of atomic layer deposited Al2O3 on Si. / Sturm, Jacobus Marinus; Zinine, A.; Wormeester, Herbert; Poelsema, Bene.

2005. - Poster session presented at MESA+ Day 2005, Enschede, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Nucleation of atomic layer deposited Al2O3 on Si

AU - Sturm, Jacobus Marinus

AU - Zinine, A.

AU - Wormeester, Herbert

AU - Poelsema, Bene

PY - 2005/9/29

Y1 - 2005/9/29

KW - METIS-227217

M3 - Poster

SP - -

ER -

Sturm JM, Zinine A, Wormeester H, Poelsema B. Nucleation of atomic layer deposited Al2O3 on Si. 2005. Poster session presented at MESA+ Day 2005, Enschede, Netherlands.