Nucleation of atomic layer deposited Al2O3 on Si

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 29 Sept 2005
Event	MESA+ Day 2005 - University of Twente, Enschede, Netherlands Duration: 29 Sept 2005 → 29 Sept 2005

Keywords

@conference{93a71a6d8ada42a7b88a98bd727a1f7c,

title = "Nucleation of atomic layer deposited Al2O3 on Si",

keywords = "METIS-227217",

author = "Sturm, \{Jacobus Marinus\} and A. Zinine and Herbert Wormeester and Bene Poelsema",

year = "2005",

month = sep,

day = "29",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2005 ; Conference date: 29-09-2005 Through 29-09-2005",

}