Nucleation of RTCVD Si and GeSi thin films

J.B. Rem, J. Holleman, J.F. Verweij

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 30 Jun 1994
    EventMESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands
    Duration: 30 Jun 199430 Jun 1994

    Conference

    ConferenceMESA Dag 1994
    CountryNetherlands
    CityEnschede
    Period30/06/9430/06/94
    Other(MESA Day/Meeting)

    Keywords

    • METIS-114865

    Cite this

    Rem, J. B., Holleman, J., & Verweij, J. F. (1994). Nucleation of RTCVD Si and GeSi thin films. -. Poster session presented at MESA Dag 1994, Enschede, Netherlands.