Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing

J.B. Rem, J. Holleman, J.F. Verweij

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationVeldhoven
    Publication statusPublished - 20 Dec 1995

    Keywords

    • METIS-114881

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