Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing

J.B. Rem, J. Holleman, J.F. Verweij

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationVeldhoven
    Publication statusPublished - 20 Dec 1995

    Keywords

    • METIS-114881

    Cite this

    Rem, J. B., Holleman, J., & Verweij, J. F. (1995, Dec 20). Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing. Veldhoven.