Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing

J.B. Rem, J. Holleman, J.F. Verweij

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationVeldhoven
    Publication statusPublished - 20 Dec 1995

    Keywords

    • METIS-114881

    Cite this

    Rem, J. B., Holleman, J., & Verweij, J. F. (1995, Dec 20). Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing. Veldhoven.
    @misc{eb100192a0744d8fa310fd57c5eebe60,
    title = "Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing",
    keywords = "METIS-114881",
    author = "J.B. Rem and J. Holleman and J.F. Verweij",
    year = "1995",
    month = "12",
    day = "20",
    language = "Undefined",
    type = "Other",

    }

    Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing. / Rem, J.B.; Holleman, J.; Verweij, J.F.

    Veldhoven. 1995, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Nucleation study of polycrystalline Si and GexSi1-x alloys using Rapid Thermal Multi Processing

    AU - Rem, J.B.

    AU - Holleman, J.

    AU - Verweij, J.F.

    PY - 1995/12/20

    Y1 - 1995/12/20

    KW - METIS-114881

    M3 - Other contribution

    CY - Veldhoven

    ER -