Numerical evaluation of piezo, thermo, electro-magnetic and electro-static MEMS actuators based on designs

When scaling down to micro dimensions, the ranking of actuation principles of operation changes. Although scaling is a generalized way of explaining physical implications when dimensions change, it doesn't deal with physical and practical limitations when designing actuators. These limitations have great influence on the performance of the actuators and need to be taken into account if a ranking needs to be made. In this paper a numerical theoretical analysis of the four most relevant principles, piezo electro, thermal, electrostatic and magnetic actuators, for MEMS based precision manipulation is summarized. The relations between work, volume, dissipation and characteristic time constant are compared. The work delivered to an optimal compliance load in one peak-to-peak full displacement cycle is regarded. In this paper transmissions like benders are not regarded. The thermal and piezo actuators are modeled as prismatic beams which deliver work by extension. The actuator volume is the minimum volume necessary for the actuator without suspension or other peripherals. Steppers are considered to be built-up out of the principals presented.