Numerical Investigation and Optimization of a Mechano-Optical Sensor based on a Grated Waveguide Optical Cavity

P.V.S. Pham Van So, L.J. Kauppinen, R.M. de Ridder, Hugo Hoekstra

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    Recently we have proposed and demonstrated a novel and compact read-out principle for cantilever deflection with a grated waveguide optical cavity. The device, consisting of a microcantilever suspended above a Si3N4 grated waveguide (GWG), is a potentially highly sensitive mechano-optical sensor for gas sensing. In this report, we present results of a numerical investigation to optimize such an integrated GWG-cantilever platform using the bidirectional eigenmode propagation method. The results show that sensitivity of the device strongly depends on the grating depth, length of the grated section and the cantilever width.
    Original languageUndefined
    Title of host publicationProceedings 15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010
    EditorsJose Pozo, Monique Mortensen, Paul Urbach, Xaveer Leijtens, Mirvais Yousefi
    Place of PublicationDelft
    PublisherUitgeverij TNO
    Number of pages4
    ISBN (Print)978-90-78314-15-8
    Publication statusPublished - 18 Nov 2010
    Event15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010 - Delft, Netherlands
    Duration: 18 Nov 201019 Nov 2010
    Conference number: 15

    Publication series

    PublisherUitgeverij TNO


    Conference15th Annual Symposium of the IEEE Photonics Benelux Chapter 2010


    • METIS-276175
    • EWI-18927
    • IR-75098

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