Numerical Simulation of wet-chemical etching

C.H. Driesen, J.G.M. Kuerten, H.K. Kuiken, P.J. Zandbergen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.
    Original languageEnglish
    Title of host publicationSixteenth International Conference on Numerical Methods in Fluid Dynamics
    Subtitle of host publicationProceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998
    EditorsCharles-Henri Bruneau
    Place of PublicationBerlin, Heidelberg
    PublisherSpringer
    Pages470-475
    ISBN (Electronic)978-3-540-49540-6
    ISBN (Print)978-3-540-65153-6
    DOIs
    Publication statusPublished - 19 Jan 1998
    Event16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998 - Arcachon, France
    Duration: 6 Jul 199810 Jul 1998
    Conference number: 16

    Publication series

    NameLecture Notes in Physics
    PublisherSpringer
    Volume515
    ISSN (Print)0075-8450
    ISSN (Electronic)1616-6361

    Conference

    Conference16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998
    Abbreviated titleNMFP
    CountryFrance
    CityArcachon
    Period6/07/9810/07/98

    Fingerprint

    etching
    convection-diffusion equation
    simulation
    finite volume method
    boundary layers

    Keywords

    • Boundary-element method
    • Etching

    Cite this

    Driesen, C. H., Kuerten, J. G. M., Kuiken, H. K., & Zandbergen, P. J. (1998). Numerical Simulation of wet-chemical etching. In C-H. Bruneau (Ed.), Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998 (pp. 470-475). (Lecture Notes in Physics; Vol. 515). Berlin, Heidelberg: Springer. https://doi.org/10.1007/BFb0106624
    Driesen, C.H. ; Kuerten, J.G.M. ; Kuiken, H.K. ; Zandbergen, P.J. / Numerical Simulation of wet-chemical etching. Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. editor / Charles-Henri Bruneau. Berlin, Heidelberg : Springer, 1998. pp. 470-475 (Lecture Notes in Physics).
    @inproceedings{725e439e5e744ee3aae9d7f8ef9ecbc6,
    title = "Numerical Simulation of wet-chemical etching",
    abstract = "The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.",
    keywords = "Boundary-element method, Etching",
    author = "C.H. Driesen and J.G.M. Kuerten and H.K. Kuiken and P.J. Zandbergen",
    year = "1998",
    month = "1",
    day = "19",
    doi = "10.1007/BFb0106624",
    language = "English",
    isbn = "978-3-540-65153-6",
    series = "Lecture Notes in Physics",
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    booktitle = "Sixteenth International Conference on Numerical Methods in Fluid Dynamics",

    }

    Driesen, CH, Kuerten, JGM, Kuiken, HK & Zandbergen, PJ 1998, Numerical Simulation of wet-chemical etching. in C-H Bruneau (ed.), Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. Lecture Notes in Physics, vol. 515, Springer, Berlin, Heidelberg, pp. 470-475, 16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998, Arcachon, France, 6/07/98. https://doi.org/10.1007/BFb0106624

    Numerical Simulation of wet-chemical etching. / Driesen, C.H.; Kuerten, J.G.M.; Kuiken, H.K.; Zandbergen, P.J.

    Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. ed. / Charles-Henri Bruneau. Berlin, Heidelberg : Springer, 1998. p. 470-475 (Lecture Notes in Physics; Vol. 515).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    N2 - The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.

    AB - The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.

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    T3 - Lecture Notes in Physics

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    BT - Sixteenth International Conference on Numerical Methods in Fluid Dynamics

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    Driesen CH, Kuerten JGM, Kuiken HK, Zandbergen PJ. Numerical Simulation of wet-chemical etching. In Bruneau C-H, editor, Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. Berlin, Heidelberg: Springer. 1998. p. 470-475. (Lecture Notes in Physics). https://doi.org/10.1007/BFb0106624