Numerical Simulation of wet-chemical etching

C.H. Driesen; J.G.M. Kuerten; H.K. Kuiken; P.J. Zandbergen

doi:10.1007/BFb0106624

Numerical Simulation of wet-chemical etching

C.H. Driesen, J.G.M. Kuerten, H.K. Kuiken, P.J. Zandbergen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.

Original language	English
Title of host publication	Sixteenth International Conference on Numerical Methods in Fluid Dynamics
Subtitle of host publication	Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998
Editors	Charles-Henri Bruneau
Place of Publication	Berlin, Heidelberg
Publisher	Springer
Pages	470-475
ISBN (Electronic)	978-3-540-49540-6
ISBN (Print)	978-3-540-65153-6
DOIs	https://doi.org/10.1007/BFb0106624
Publication status	Published - 19 Jan 1998
Event	16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998 - Arcachon, France Duration: 6 Jul 1998 → 10 Jul 1998 Conference number: 16

Publication series

Name	Lecture Notes in Physics
Publisher	Springer
Volume	515
ISSN (Print)	0075-8450
ISSN (Electronic)	1616-6361

Conference

Conference	16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998
Abbreviated title	NMFP
Country/Territory	France
City	Arcachon
Period	6/07/98 → 10/07/98

Keywords

Boundary-element method
Etching

Access to Document

10.1007/BFb0106624

Cite this

Driesen, C. H., Kuerten, J. G. M., Kuiken, H. K., & Zandbergen, P. J. (1998). Numerical Simulation of wet-chemical etching. In C.-H. Bruneau (Ed.), Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998 (pp. 470-475). (Lecture Notes in Physics; Vol. 515). Springer. https://doi.org/10.1007/BFb0106624

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title = "Numerical Simulation of wet-chemical etching",

abstract = "The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.",

keywords = "Boundary-element method, Etching",

author = "C.H. Driesen and J.G.M. Kuerten and H.K. Kuiken and P.J. Zandbergen",

year = "1998",

month = jan,

day = "19",

doi = "10.1007/BFb0106624",

language = "English",

isbn = "978-3-540-65153-6",

series = "Lecture Notes in Physics",

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pages = "470--475",

editor = "Charles-Henri Bruneau",

booktitle = "Sixteenth International Conference on Numerical Methods in Fluid Dynamics",

address = "Germany",

note = "16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998, NMFP ; Conference date: 06-07-1998 Through 10-07-1998",

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Driesen, CH, Kuerten, JGM, Kuiken, HK & Zandbergen, PJ 1998, Numerical Simulation of wet-chemical etching. in C-H Bruneau (ed.), Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. Lecture Notes in Physics, vol. 515, Springer, Berlin, Heidelberg, pp. 470-475, 16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998, Arcachon, France, 6/07/98. https://doi.org/10.1007/BFb0106624

Numerical Simulation of wet-chemical etching. / Driesen, C.H.; Kuerten, J.G.M.; Kuiken, H.K. et al.
Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. ed. / Charles-Henri Bruneau. Berlin, Heidelberg: Springer, 1998. p. 470-475 (Lecture Notes in Physics; Vol. 515).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Numerical Simulation of wet-chemical etching

AU - Driesen, C.H.

AU - Kuerten, J.G.M.

AU - Kuiken, H.K.

AU - Zandbergen, P.J.

N1 - Conference code: 16

PY - 1998/1/19

Y1 - 1998/1/19

N2 - The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.

AB - The concentration of dissolved material in an etch-hole is computed in order to construct a numerical simulation of wet-chemical etching. Using a number of assumptions an approximate convection-diffusion equation is formulated. In this way, analytical descriptions for the concentration in different parts of the domain are obtained. By a coupling of these descriptions the concentration can be computed. The result is validated by comparison with a finite-volume method. Results of the boundary-layer method are given for an etch-hole geometry.

KW - Boundary-element method

KW - Etching

U2 - 10.1007/BFb0106624

DO - 10.1007/BFb0106624

M3 - Conference contribution

SN - 978-3-540-65153-6

T3 - Lecture Notes in Physics

SP - 470

EP - 475

BT - Sixteenth International Conference on Numerical Methods in Fluid Dynamics

A2 - Bruneau, Charles-Henri

PB - Springer

CY - Berlin, Heidelberg

T2 - 16th International Conference on Numerical Methods in Fluid Dynamics, NMFP 1998

Y2 - 6 July 1998 through 10 July 1998

ER -

Driesen CH, Kuerten JGM, Kuiken HK, Zandbergen PJ. Numerical Simulation of wet-chemical etching. In Bruneau CH, editor, Sixteenth International Conference on Numerical Methods in Fluid Dynamics: Proceedings of the Conference Held in Arcachon, France, 6 – 10 July 1998. Berlin, Heidelberg: Springer. 1998. p. 470-475. (Lecture Notes in Physics). doi: 10.1007/BFb0106624

Numerical Simulation of wet-chemical etching

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