On-chip reflowed polymer microlenses for collimating light from single-mode optical waveguides

Lantian Chang, N. Ismail, R.M. de Ridder, Markus Pollnau, Kerstin Worhoff

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Abstract

    We demonstrate a technique for solving the general problem of light collimation from planar channel waveguides in both lateral and vertical directions. The reflowed polymer microlens technique enables direct on-chip integration and yields mass-fabrication feasibility. Beam propagation simulation on a 90-μm-diameter microlens results in a Gaussian beam with 46 μm diameter at a distance of 2.5 mm from the microlens. First test structures have been fabricated by reflowing photoresist cylinders with 81 μm height and 83 μm diameter. The resulting spherical lenses have the diameter of 89 μm. Optical investigation is ongoing.
    Original languageUndefined
    Title of host publication17th Annual Symposium of the IEEE Photonics Benelux Chapter
    Place of PublicationMons, Belgium
    PublisherFaculty of Engineering, University of Mons
    Pages243-246
    Number of pages4
    ISBN (Print)978-2-8052-0184-4
    Publication statusPublished - 29 Nov 2012
    Event17th Annual Symposium of the IEEE Photonics Benelux Chapter 2012 - Mons, Belgium
    Duration: 29 Nov 201230 Nov 2012
    Conference number: 17
    http://www.telecom.fpms.ac.be/IPS_symposium2012/

    Publication series

    Name
    PublisherFaculty of Engineering, University of Mons

    Conference

    Conference17th Annual Symposium of the IEEE Photonics Benelux Chapter 2012
    CountryBelgium
    CityMons
    Period29/11/1230/11/12
    Internet address

    Keywords

    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • IR-83530
    • METIS-296172
    • EWI-22690

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