On frequency-based interface circuits for capacitive MEMS accelerometers

Zhiliang Qiao (Corresponding Author), Boris A. Boom, Anne J. Annema, Remco J. Wiegerink, Bram Nauta

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
85 Downloads (Pure)

Abstract

Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these techniques and presents a derivation of the fundamental resolution limits that are imposed on them by phase noise. Starting with an overview of basic operating principles, associated properties and challenges, the discussions then focus on the fundamental trade-offs between noise, power dissipation and signal bandwidth (BW) for the LC-oscillator-based frequency readout and for the conventional charge-based switched-capacitor (SC) readout. Closed-form analytical formulas are derived to facilitate a fair comparison between the two approaches. Benchmarking results indicate that, with the same bandwidth requirement, charge-based readout circuits are more suitable when optimizing for noise performance, while there is still some room for frequency-based techniques when optimizing for power consumption, especially when flicker phase noise can be mitigated.
Original languageEnglish
Article number488
Number of pages21
JournalMicromachines
Volume9
Issue number10
DOIs
Publication statusPublished - 25 Sep 2018

Fingerprint

Phase noise
Accelerometers
MEMS
Bandwidth
Networks (circuits)
Benchmarking
Energy dissipation
Electric power utilization
Capacitors

Keywords

  • Oscillator
  • Frequency
  • Interface
  • Readout
  • MEMS
  • Capacitive
  • Accelerometer
  • Noise
  • Power
  • Bandwidth

Cite this

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title = "On frequency-based interface circuits for capacitive MEMS accelerometers",
abstract = "Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these techniques and presents a derivation of the fundamental resolution limits that are imposed on them by phase noise. Starting with an overview of basic operating principles, associated properties and challenges, the discussions then focus on the fundamental trade-offs between noise, power dissipation and signal bandwidth (BW) for the LC-oscillator-based frequency readout and for the conventional charge-based switched-capacitor (SC) readout. Closed-form analytical formulas are derived to facilitate a fair comparison between the two approaches. Benchmarking results indicate that, with the same bandwidth requirement, charge-based readout circuits are more suitable when optimizing for noise performance, while there is still some room for frequency-based techniques when optimizing for power consumption, especially when flicker phase noise can be mitigated.",
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On frequency-based interface circuits for capacitive MEMS accelerometers. / Qiao, Zhiliang (Corresponding Author); Boom, Boris A.; Annema, Anne J.; Wiegerink, Remco J.; Nauta, Bram .

In: Micromachines, Vol. 9, No. 10, 488, 25.09.2018.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - On frequency-based interface circuits for capacitive MEMS accelerometers

AU - Qiao, Zhiliang

AU - Boom, Boris A.

AU - Annema, Anne J.

AU - Wiegerink, Remco J.

AU - Nauta, Bram

PY - 2018/9/25

Y1 - 2018/9/25

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AB - Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these techniques and presents a derivation of the fundamental resolution limits that are imposed on them by phase noise. Starting with an overview of basic operating principles, associated properties and challenges, the discussions then focus on the fundamental trade-offs between noise, power dissipation and signal bandwidth (BW) for the LC-oscillator-based frequency readout and for the conventional charge-based switched-capacitor (SC) readout. Closed-form analytical formulas are derived to facilitate a fair comparison between the two approaches. Benchmarking results indicate that, with the same bandwidth requirement, charge-based readout circuits are more suitable when optimizing for noise performance, while there is still some room for frequency-based techniques when optimizing for power consumption, especially when flicker phase noise can be mitigated.

KW - Oscillator

KW - Frequency

KW - Interface

KW - Readout

KW - MEMS

KW - Capacitive

KW - Accelerometer

KW - Noise

KW - Power

KW - Bandwidth

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