On how to measure the probabilities of target atom ionization and target ion back-attraction in high-power impulse magnetron sputtering

Martin Rudolph*, Hamidreza Hajihoseini, Michael A. Raadu, Jon Tomas Gudmundsson, Nils Brenning, Tiberiu M. Minea, André Anders, Daniel Lundin

*Corresponding author for this work

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Physics & Astronomy