On the Accuracy of the Cox-Strack Equation and Method for Contact Resistivity Determination

Milou van Rijnbach; Raymond J.E. Hueting; Maciej Stodolny; Gaby Janssen; Jimmy Melskens; Jurriaan Schmitz

doi:10.1109/TED.2020.2974194

On the Accuracy of the Cox-Strack Equation and Method for Contact Resistivity Determination

Milou van Rijnbach, Raymond J.E. Hueting, Maciej Stodolny, Gaby Janssen, Jimmy Melskens, Jurriaan Schmitz

Integrated Devices and Systems

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Abstract

The Cox-Strack method is commonly applied to assess the contact resistivity between a metal and a semiconductor since the 1960s, while the underlying assumptions have not yet been rigorously assessed. In this article, a combination of finite-element modeling and mathematical analysis is used to investigate the accuracy of the conventional Cox-Strack equation for generic metal-semiconductor junctions. A systematic error in the spreading resistance equation is quantified, and alternative, more accurate equations are presented. Furthermore, it is shown that commonly used experimental configurations can lead to highly overestimated contact resistivities. Guidelines are formulated for accurate extraction of the contact resistivity from the Cox-Strack measurements.

Original language	English
Article number	9031713
Pages (from-to)	1757-1763
Number of pages	7
Journal	IEEE Transactions on Electron Devices
Volume	67
Issue number	4
Early online date	10 Mar 2020
DOIs	https://doi.org/10.1109/TED.2020.2974194
Publication status	Published - 1 Apr 2020

Keywords

22/2 OA procedure

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/TED.2020.2974194

ArticleFinal published version, 1.38 MBLicence: Taverne

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abstract = "The Cox-Strack method is commonly applied to assess the contact resistivity between a metal and a semiconductor since the 1960s, while the underlying assumptions have not yet been rigorously assessed. In this article, a combination of finite-element modeling and mathematical analysis is used to investigate the accuracy of the conventional Cox-Strack equation for generic metal-semiconductor junctions. A systematic error in the spreading resistance equation is quantified, and alternative, more accurate equations are presented. Furthermore, it is shown that commonly used experimental configurations can lead to highly overestimated contact resistivities. Guidelines are formulated for accurate extraction of the contact resistivity from the Cox-Strack measurements.",

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AU - Melskens, Jimmy

AU - Schmitz, Jurriaan

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On the Accuracy of the Cox-Strack Equation and Method for Contact Resistivity Determination

Abstract

Keywords

UN SDGs

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