Up to now, mainly uniaxial accelerometers are described in most publications concerning this subject. However, triaxial accelerometers are needed in the biomedical field. Commercially available triaxial accelerometers consisting of three orthogonally positioned uniaxial devices do not meet all specifications of the biomedical application. Therefore, a new highly symmetrical inherently triaxial accelerometer is being developed, the advantages of which are higher sensitivity and reduction of off-axis sensitivity.
|Journal||Journal of micromechanics and microengineering|
|Publication status||Published - 1995|