Abstract
In this work an alternative approach to the modelling of plates with a large number of holes, is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalising the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electromechanical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algoritbm based on finite differences.
Original language | Undefined |
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Title of host publication | Transducers '95 |
Place of Publication | Stockholm, Sweden |
Publisher | IEEE |
Pages | 234A7-13-234A7-16 |
Number of pages | 4 |
Publication status | Published - 9 Jan 1995 |
Event | Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 Conference number: 9 |
Publication series
Name | |
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Publisher | IEEE |
Volume | 2 |
Conference
Conference | Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors |
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Country/Territory | Sweden |
City | Stockholm |
Period | 25/06/95 → 29/06/95 |
Keywords
- IR-16890
- METIS-113775