On the electromechanical behaviour of thin perforated backplates

M. Pedersen, Wouter Olthuis, Piet Bergveld

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    3 Citations (Scopus)
    69 Downloads (Pure)

    Abstract

    In this work an alternative approach to the modelling of plates with a large number of holes, is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalising the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electromechanical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algoritbm based on finite differences.
    Original languageUndefined
    Title of host publicationTransducers '95
    Place of PublicationStockholm, Sweden
    PublisherIEEE
    Pages234A7-13-234A7-16
    Number of pages4
    Publication statusPublished - 9 Jan 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    CountrySweden
    CityStockholm
    Period25/06/9529/06/95

    Keywords

    • IR-16890
    • METIS-113775

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