On the extension of the pulse length of a discharge excited ArF excimer laser

Hubertus M.J. Bastiaens, P.J.M. Peters, W.J. Witteman, L. Feenstra

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{efbaccdf3c7a47c38eb76c3d41660959,

title = "On the extension of the pulse length of a discharge excited ArF excimer laser",

keywords = "METIS-128462",

author = "Bastiaens, {Hubertus M.J.} and P.J.M. Peters and W.J. Witteman and L. Feenstra",

year = "2000",

language = "Undefined",

volume = "10",

pages = "382--386",

journal = "Laser physics",

issn = "1054-660X",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "1",

}