On the extension of the pulse length of a discharge excited ArF excimer laser

Hubertus M.J. Bastiaens, P.J.M. Peters, W.J. Witteman, L. Feenstra

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined
Pages (from-to)382-386
Number of pages5
JournalLaser physics
Volume10
Issue number1
Publication statusPublished - 2000

Keywords

  • METIS-128462

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