On the formation of black silicon in SF6-O2plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand

Vy Thi Hoang Nguyen, Flemming Jensen, Jörg Hübner, Pele Leussink, Henri Jansen*

*Corresponding author for this work

    Research output: Contribution to journal › Article › Academic › peer-review

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