This paper presents the operational characteristics of several integrated Micromegas detectors. These detectors called InGrids are made by means of micro-electronic fabrication techniques. These techniques allow a large variety of detector geometry to be made and studied. Gain, gain homogeneity and energy resolution were measured for various amplification gap sizes, hole pitches and hole diameters in Argon/Isobutane. Gain measurements as a function of gap thickness are compared to the Rose and Korff formula and a model of the detector gain. Our model uses electric field maps and MAGBOLTZ calculated amplification coefficients.
|Number of pages||4|
|Journal||Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment|
|Publication status||Published - 17 Jun 2007|
- Integrated Micromegas
- Energy resolution
- Wafer post-procesing
- SC-RID: Radiation Imaging detectors