On the kinetics of modified CVD in porous ceramics

G.Z. Cao, H.W. Brinkman, J. Meijerink, K.J. de Vries, A.J. Burggraaf

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Abstract

This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.
Original languageEnglish
Pages (from-to)67-74
Number of pages8
JournalJournal de physique IV
VolumeC3
DOIs
Publication statusPublished - 1993
Event9th European Conference on Chemical Vapour Deposition, EURO CVD 1993 - Tampere, Finland
Duration: 22 Aug 199327 Aug 1993
Conference number: 9

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