On the kinetics of modified CVD in porous ceramics

G.Z. Cao; H.W. Brinkman; J. Meijerink; K.J. de Vries; A.J. Burggraaf

doi:10.1051/jp4:1993308

On the kinetics of modified CVD in porous ceramics

G.Z. Cao, H.W. Brinkman, J. Meijerink, K.J. de Vries, A.J. Burggraaf

Inorganic Materials Science

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.

Original language	English
Pages (from-to)	67-74
Number of pages	8
Journal	Journal de physique IV
Volume	C3
DOIs	https://doi.org/10.1051/jp4:1993308
Publication status	Published - 1993
Event	9th European Conference on Chemical Vapour Deposition, EURO CVD 1993 - Tampere, Finland Duration: 22 Aug 1993 → 27 Aug 1993 Conference number: 9

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On the kinetics of modified CVD in porous ceramics
G.Z. Cao (Speaker), H.W. Brinkman (Speaker), J. Meijerink (Speaker), K.J. de Vries (Speaker) & A.J. Burggraaf (Speaker)
22 Aug 1993
Activity: Talk or presentation › Oral presentation

Cite this

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title = "On the kinetics of modified CVD in porous ceramics",

abstract = "This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.",

author = "G.Z. Cao and H.W. Brinkman and J. Meijerink and {de Vries}, K.J. and A.J. Burggraaf",

year = "1993",

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T1 - On the kinetics of modified CVD in porous ceramics

AU - Cao, G.Z.

AU - Brinkman, H.W.

AU - Meijerink, J.

AU - de Vries, K.J.

AU - Burggraaf, A.J.

N1 - Conference code: 9

PY - 1993

Y1 - 1993

N2 - This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.

AB - This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.

U2 - 10.1051/jp4:1993308

DO - 10.1051/jp4:1993308

M3 - Article

SN - 1155-4339

VL - C3

SP - 67

EP - 74

JO - Journal de physique IV

JF - Journal de physique IV

T2 - 9th European Conference on Chemical Vapour Deposition, EURO CVD 1993

Y2 - 22 August 1993 through 27 August 1993

ER -

On the kinetics of modified CVD in porous ceramics

Abstract

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On the kinetics of modified CVD in porous ceramics

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