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Abstract
This paper reports a kinetic study on modified CVD process in porous ceramic substrates by both theoretical analysis and experimental approach. The theoretical analysis indicates that with a heterogeneous chemical reaction the decrease of the pore size is proportional to the deposition time and the pore closure time is proportional to the original pore size. While for a homogeneous reaction the pore size decreases exponentially with the deposition time and it is very difficult to achieve pore closure. The experimental results indicate that the deposition of YSZ in porous ceramics is a heterogeneous reaction.
Original language | English |
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Pages (from-to) | 67-74 |
Number of pages | 8 |
Journal | Journal de physique IV |
Volume | C3 |
DOIs | |
Publication status | Published - 1993 |
Event | 9th European Conference on Chemical Vapour Deposition, EURO CVD 1993 - Tampere, Finland Duration: 22 Aug 1993 → 27 Aug 1993 Conference number: 9 |
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Dive into the research topics of 'On the kinetics of modified CVD in porous ceramics'. Together they form a unique fingerprint.Activities
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On the kinetics of modified CVD in porous ceramics
Cao, G. Z. (Speaker), Brinkman, H. W. (Speaker), Meijerink, J. (Speaker), de Vries, K. J. (Speaker) & Burggraaf, A. J. (Speaker)
22 Aug 1993Activity: Talk or presentation › Oral presentation