On the long pulse operation of a discharge pumped ArF excimer laser

L. Feenstra

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

14 Downloads (Pure)
Original languageUndefined
Supervisors/Advisors
  • Witteman, W.J., Supervisor
  • Peters, P.J.M., Advisor
Award date10 Sep 1999
Place of PublicationEnschede
Publisher
Print ISBNs90-365 133 83
Publication statusPublished - 10 Sep 1999

Keywords

  • METIS-128283
  • IR-23486

Cite this

Feenstra, L. (1999). On the long pulse operation of a discharge pumped ArF excimer laser. Enschede: Universiteit Twente.
Feenstra, L.. / On the long pulse operation of a discharge pumped ArF excimer laser. Enschede : Universiteit Twente, 1999. 163 p.
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On the long pulse operation of a discharge pumped ArF excimer laser. / Feenstra, L.

Enschede : Universiteit Twente, 1999. 163 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

TY - THES

T1 - On the long pulse operation of a discharge pumped ArF excimer laser

AU - Feenstra, L.

PY - 1999/9/10

Y1 - 1999/9/10

KW - METIS-128283

KW - IR-23486

M3 - PhD Thesis - Research UT, graduation UT

SN - 90-365 133 83

PB - Universiteit Twente

CY - Enschede

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Feenstra L. On the long pulse operation of a discharge pumped ArF excimer laser. Enschede: Universiteit Twente, 1999. 163 p.