On the long pulse operation of a discharge pumped ArF excimer laser

Louw Feenstra

Research output: ThesisPhD Thesis - Research UT, graduation UT

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Witteman, W.J., Supervisor
  • Peters, P.J.M., Advisor
Award date10 Sep 1999
Place of PublicationEnschede
Publisher
Print ISBNs90-365-1338-3
DOIs
Publication statusPublished - 10 Sep 1999

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