On the long pulse operation of an X-ray preionised, gas discharge pumped ArF excimer laser

L. Feenstra, Hubertus M.J. Bastiaens, P.J.M. Peters, W.J. Witteman

Research output: Contribution to journalArticleAcademicpeer-review

5 Citations (Scopus)
Original languageUndefined
Pages (from-to)1033-1035
Number of pages3
JournalApplied physics letters
Volume75
Issue number8
Publication statusPublished - 1999

Keywords

  • METIS-128498

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