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On the long pulse operation of an X-ray preionised, gas discharge pumped ArF excimer laser

  • L. Feenstra
  • , Hubertus M.J. Bastiaens
  • , P.J.M. Peters
  • , W.J. Witteman

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined
Pages (from-to)1033-1035
Number of pages3
JournalApplied physics letters
Volume75
Issue number8
Publication statusPublished - 1999

Keywords

  • METIS-128498

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