On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)-
    JournalSensors and actuators. A: Physical
    Publication statusPublished - 1995

    Keywords

    • METIS-111978

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