On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    19 Citations (Scopus)
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    Abstract

    In this paper an alternative approach to the modelling of plates with a large number of holes is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalizing the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electrochemical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algorithm based on finite differences.
    Original languageUndefined
    Pages (from-to)-
    JournalSensors and actuators. A: Physical
    Volume54
    Issue number1-3
    DOIs
    Publication statusPublished - 1996

    Keywords

    • METIS-111988
    • IR-15115

    Cite this

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    title = "On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones",
    abstract = "In this paper an alternative approach to the modelling of plates with a large number of holes is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalizing the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electrochemical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algorithm based on finite differences.",
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    author = "M. Pedersen and Wouter Olthuis and Piet Bergveld",
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    volume = "54",
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    On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones. / Pedersen, M.; Olthuis, Wouter; Bergveld, Piet.

    In: Sensors and actuators. A: Physical, Vol. 54, No. 1-3, 1996, p. -.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones

    AU - Pedersen, M.

    AU - Olthuis, Wouter

    AU - Bergveld, Piet

    PY - 1996

    Y1 - 1996

    N2 - In this paper an alternative approach to the modelling of plates with a large number of holes is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalizing the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electrochemical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algorithm based on finite differences.

    AB - In this paper an alternative approach to the modelling of plates with a large number of holes is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalizing the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electrochemical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algorithm based on finite differences.

    KW - METIS-111988

    KW - IR-15115

    U2 - 10.1016/S0924-4247(95)01189-7

    DO - 10.1016/S0924-4247(95)01189-7

    M3 - Article

    VL - 54

    SP - -

    JO - Sensors and actuators. A: Physical

    JF - Sensors and actuators. A: Physical

    SN - 0924-4247

    IS - 1-3

    ER -