On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones

Michael Pedersen, Wouter Olthuis, Piet Bergveld

Research output: Contribution to journal › Article › Academic › peer-review

Original language	English
Journal	Sensors and Actuators A: Physical
Publication status	Published - 1995

Cite this

@article{1c8cc4bd10d14a3cb9d3aabdc623c81f,

title = "On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones",

author = "Michael Pedersen and Wouter Olthuis and Piet Bergveld",

year = "1995",

language = "English",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

}