On the optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser

Ramon M. Hofstra, John C.M. Timmermans, Huub J.G. van Heel

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Abstract

The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.
Original languageEnglish
Title of host publicationAdvanced High-Power Lasers
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages388-395
Number of pages8
ISBN (Print)0-8/94-3487-6
DOIs
Publication statusPublished - 1 Jan 2000
EventInternational Forum on Advanced High-Power Lasers and Applications 1999 - Osaka University Convention Center, Osaka, Japan
Duration: 1 Nov 19995 Nov 1999

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume3889
ISSN (Print)0277-786X

Conference

ConferenceInternational Forum on Advanced High-Power Lasers and Applications 1999
CountryJapan
CityOsaka
Period1/11/995/11/99

Keywords

  • METIS-130716
  • IR-96134
  • 1kW
  • Excimer lasers
  • XeC1
  • Optics
  • Resonator
  • Pointing variation

Fingerprint Dive into the research topics of 'On the optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser'. Together they form a unique fingerprint.

  • Cite this

    Hofstra, R. M., Timmermans, J. C. M., & van Heel, H. J. G. (2000). On the optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser. In Advanced High-Power Lasers (pp. 388-395). (Proceedings of SPIE; Vol. 3889). Bellingham, WA, USA: SPIE. https://doi.org/10.1117/12.380908