Abstract
Extensive computer simulations of NPN SiGe-base bipolar transistors were performed to examine the effect of the Ge profile in the electrical characteristics. It is shown that extra charge storage in the emitter-base (E-B) junction, caused by the Ge profile, affects the device performance considerably. In addition, it is shown that an abrupt Ge profile in the middle of the base region is optimal for a given critical layer thickness of approximately 600A.
| Original language | English |
|---|---|
| Title of host publication | ESSDERC 1995 - Proceedings of the 25th European Solid State Device Research Conference |
| Editors | Henk C. de Graaff, Henk C. de Graaff, Herma van Kranenburg |
| Publisher | IEEE |
| Pages | 59-62 |
| Number of pages | 4 |
| ISBN (Electronic) | 286332182X |
| ISBN (Print) | 9782863321829 |
| Publication status | Published - 1 Jan 1995 |
| Externally published | Yes |
| Event | 25th European Solid State Device Research Conference, ESSDERC 1995 - The Hague, Netherlands Duration: 25 Sept 1995 → 27 Sept 1995 Conference number: 25 |
Conference
| Conference | 25th European Solid State Device Research Conference, ESSDERC 1995 |
|---|---|
| Abbreviated title | ESSDERC |
| Country/Territory | Netherlands |
| City | The Hague |
| Period | 25/09/95 → 27/09/95 |
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