On the Resonance Frequencies of Microbridges

S. Bouwstra; Bert Geijselaers

doi:10.1109/SENSOR.1991.148932

On the Resonance Frequencies of Microbridges

S. Bouwstra^*, Bert Geijselaers

^*Corresponding author for this work

Nonlinear Solid Mechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

91 Citations (Scopus)

357 Downloads (Pure)

Abstract

The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor.

Original language	English
Title of host publication	TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators
Subtitle of host publication	Digest of Technical Papers
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	538-542
Number of pages	5
ISBN (Print)	9780879425852
DOIs	https://doi.org/10.1109/SENSOR.1991.148932
Publication status	Published - 24 Jun 1991
Event	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States Duration: 24 Jun 1991 → 27 Jun 1991

Conference

Conference	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated title	TRANSDUCERS '91
Country/Territory	United States
City	San Francisco
Period	24/06/91 → 27/06/91

Keywords

Resonance
Resonant frequency
Geometry
Equations
Solid state circuits
Micromechanical devices
22/4 OA procedure

Access to Document

10.1109/SENSOR.1991.148932

Bouwstra 1991_On the resonance frequencies of microbridgesFinal published version, 564 KBLicence: Taverne

Cite this

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title = "On the Resonance Frequencies of Microbridges",

abstract = "The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor.",

keywords = "Resonance, Resonant frequency, Geometry, Equations, Solid state circuits, Micromechanical devices, 22/4 OA procedure",

author = "S. Bouwstra and Bert Geijselaers",

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doi = "10.1109/SENSOR.1991.148932",

language = "English",

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booktitle = "TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators",

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Bouwstra, S & Geijselaers, B 1991, On the Resonance Frequencies of Microbridges. in TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators: Digest of Technical Papers. IEEE, Piscataway, NJ, pp. 538-542, 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, San Francisco, California, United States, 24/06/91. https://doi.org/10.1109/SENSOR.1991.148932

TY - GEN

T1 - On the Resonance Frequencies of Microbridges

AU - Bouwstra, S.

AU - Geijselaers, Bert

PY - 1991/6/24

Y1 - 1991/6/24

N2 - The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor.

AB - The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor.

KW - Resonance

KW - Resonant frequency

KW - Geometry

KW - Equations

KW - Solid state circuits

KW - Micromechanical devices

KW - 22/4 OA procedure

U2 - 10.1109/SENSOR.1991.148932

DO - 10.1109/SENSOR.1991.148932

M3 - Conference contribution

SN - 9780879425852

SP - 538

EP - 542

BT - TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators

PB - IEEE

CY - Piscataway, NJ

T2 - 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991

Y2 - 24 June 1991 through 27 June 1991

ER -

On the Resonance Frequencies of Microbridges

Abstract

Conference

Keywords

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