On the Resonance Frequencies of Microbridges

Siebe Bouwstra, Bert Geijselaers

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    81 Citations (Scopus)
    229 Downloads (Pure)

    Abstract

    The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor
    Original languageEnglish
    Title of host publicationTRANSDUCERS '91
    Subtitle of host publication1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages538-542
    Number of pages5
    ISBN (Print)9780879425852
    DOIs
    Publication statusPublished - 24 Jun 1991
    Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
    Duration: 24 Jun 199127 Jun 1991

    Conference

    Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
    Abbreviated titleTRANSDUCERS '91
    CountryUnited States
    CitySan Francisco
    Period24/06/9127/06/91

    Keywords

    • Electromechanical devices
    • Mass flow sensor
    • Transversely vibrating microbridge

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