On the resonance frequencies of microbridges

S. Bouwstra*, Bert Geijselaers

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The authors present the exact analysis of the natural frequencies of transverse bending of flat clamped-clamped beams subject to an axial force. Extensions of this model are presented for several aspects of transversely vibrating microbridges for which this model falls short. The behavior of buckled or initially deflected beams is modeled, as well as the behavior of beams with a small length-to-width ratio. The deformation of the elastic support is analyzed, revealing a significant compliance of the support compared to typical compliances of microbridges. The results of these models are compared with experimental results obtained from a resonating microbridge mass flow sensor.
Original languageEnglish
Title of host publicationTRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators
Subtitle of host publicationDigest of Technical Papers
PublisherIEEE
Pages538-542
Publication statusPublished - Jun 1991
Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
Duration: 24 Jun 199127 Jun 1991

Conference

Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated titleTRANSDUCERS '91
CountryUnited States
CitySan Francisco
Period24/06/9127/06/91

Keywords

  • Resonance
  • Resonant frequency
  • Geometry
  • Equations
  • Solid state circuits
  • Micromechanical devices

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