TY - GEN
T1 - On the rule of thumb for flipping the dispersion relation in BAW devices
AU - Jose, S.
AU - Hueting, R.J.E.
AU - Jansman, A.B.M.
PY - 2011/10/18
Y1 - 2011/10/18
N2 - High-performance solidly mounted bulk acoustic wave resonators (SMRs) can be obtained by employing frame region, if these exhibit type I dispersion. The commonly used piezoelectric material Aluminum Nitride is a type II material, for which type I dispersion can be enforced by increasing the top low-acoustic-impedance (silicon dioxide) layer thickness of the mirror. However a criterion for flipping was not investigated. In this work we propose a rule of thumb for flipping dispersion curves, applicable for FBARs and SMRs.
AB - High-performance solidly mounted bulk acoustic wave resonators (SMRs) can be obtained by employing frame region, if these exhibit type I dispersion. The commonly used piezoelectric material Aluminum Nitride is a type II material, for which type I dispersion can be enforced by increasing the top low-acoustic-impedance (silicon dioxide) layer thickness of the mirror. However a criterion for flipping was not investigated. In this work we propose a rule of thumb for flipping dispersion curves, applicable for FBARs and SMRs.
U2 - 10.1109/ULTSYM.2011.0427
DO - 10.1109/ULTSYM.2011.0427
M3 - Conference contribution
SN - 978-1-4577-1253-1
SN - 978-1-4577-1251-7 (CD)
T3 - IEEE International Ultrasonics Symposium
SP - 1712
EP - 1715
BT - 2011 IEEE International Ultrasonics Symposium
PB - IEEE
CY - Los Alamitos, CA, USA
T2 - IEEE International Ultrasonics Symposium, IUS 2011
Y2 - 18 October 2011 through 21 October 2011
ER -