High-performance solidly mounted bulk acoustic wave resonators (SMRs) can be obtained by employing frame region, if these exhibit type I dispersion. The commonly used piezoelectric material Aluminum Nitride is a type II material, for which type I dispersion can be enforced by increasing the top low-acoustic-impedance (silicon dioxide) layer thickness of the mirror. However a criterion for flipping was not investigated. In this work we propose a rule of thumb for flipping dispersion curves, applicable for FBARs and SMRs.
|Conference||IEEE International Ultrasonics Symposium, IUS 2011|
|Period||18/10/11 → 21/10/11|