On the rule of thumb for flipping the dispersion relation in BAW devices

Sumy Jose, Raymond Josephus Engelbart Hueting, Andreas Jansman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    High-performance solidly mounted bulk acoustic wave resonators (SMRs) can be obtained by employing frame region, if these exhibit type I dispersion. The commonly used piezoelectric material Aluminum Nitride is a type II material, for which type I dispersion can be enforced by increasing the top low-acoustic-impedance (silicon dioxide) layer thickness of the mirror. However a criterion for flipping was not investigated. In this work we propose a rule of thumb for flipping dispersion curves, applicable for FBARs and SMRs.
    Original languageEnglish
    Title of host publicationUnknown
    Place of PublicationLos Alamitos, CA, USA
    PublisherIEEE
    Pages-1712
    ISBN (Print)1715
    DOIs
    Publication statusPublished - 18 Oct 2011
    EventIEEE International Ultrasonics Symposium, IUS 2011 - Orlando, United States
    Duration: 18 Oct 201121 Oct 2011

    Publication series

    Name
    PublisherIEEE
    ISSN (Print)1948-5719

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2011
    Abbreviated titleIUS
    CountryUnited States
    CityOrlando
    Period18/10/1121/10/11

    Keywords

    • METIS-297982
    • IR-88051

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