On the simulation of subminiature condenser microphones using finite differences

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 1st International conference on the simulation and design of microsystems and microstructures
    Place of PublicationSouthampton, UK
    Number of pages8
    Publication statusPublished - 1 Sep 1995


    • METIS-113771

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