On the simulation of subminiature condenser microphones using finite differences

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 1st International conference on the simulation and design of microsystems and microstructures
    Place of PublicationSouthampton, UK
    Pages185-192
    Number of pages8
    Publication statusPublished - 1 Sep 1995

    Keywords

    • METIS-113771

    Cite this

    Pedersen, M., Olthuis, W., & Bergveld, P. (1995). On the simulation of subminiature condenser microphones using finite differences. In Proceedings of the 1st International conference on the simulation and design of microsystems and microstructures (pp. 185-192). Southampton, UK.