On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits

L. Feenstra, O.B. Hoekstra, W.J. Witteman, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.
Original languageEnglish
Title of host publicationXII International Symposium Gas Flow and Chemical lasers and High power Laser
PublisherSPIE
Pages67-73
Number of pages7
ISBN (Print)0-8194-3039-0
DOIs
Publication statusPublished - 31 Aug 1998

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume3574
ISSN (Print)0277-786X

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Keywords

  • METIS-130710
  • IR-96098

Cite this

Feenstra, L., Hoekstra, O. B., Witteman, W. J., & Peters, P. J. M. (1998). On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits. In XII International Symposium Gas Flow and Chemical lasers and High power Laser (pp. 67-73). (Proceedings of SPIE; Vol. 3574). SPIE. https://doi.org/10.1117/12.334503