On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits

L. Feenstra, O.B. Hoekstra, W.J. Witteman, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.
Original languageEnglish
Title of host publicationXII International Symposium Gas Flow and Chemical lasers and High power Laser
PublisherSPIE
Pages67-73
Number of pages7
ISBN (Print)0-8194-3039-0
DOIs
Publication statusPublished - 31 Aug 1998
EventXII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser - St. Petersburg, Russia
Duration: 31 Aug 19985 Sep 1998

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume3574
ISSN (Print)0277-786X

Conference

ConferenceXII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser
Period31/08/985/09/98
Other31 August - 5 September 1998

Keywords

  • METIS-130710
  • IR-96098

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