On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits

L. Feenstra, O.B. Hoekstra, W.J. Witteman, P.J.M. Peters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.
Original languageEnglish
Title of host publicationXII International Symposium Gas Flow and Chemical lasers and High power Laser
PublisherSPIE
Pages67-73
Number of pages7
ISBN (Print)0-8194-3039-0
DOIs
Publication statusPublished - 31 Aug 1998

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume3574
ISSN (Print)0277-786X

Fingerprint

excimer lasers
time measurement
laser outputs
excitation
x rays
energy

Keywords

  • METIS-130710
  • IR-96098

Cite this

Feenstra, L., Hoekstra, O. B., Witteman, W. J., & Peters, P. J. M. (1998). On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits. In XII International Symposium Gas Flow and Chemical lasers and High power Laser (pp. 67-73). (Proceedings of SPIE; Vol. 3574). SPIE. https://doi.org/10.1117/12.334503
Feenstra, L. ; Hoekstra, O.B. ; Witteman, W.J. ; Peters, P.J.M. / On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits. XII International Symposium Gas Flow and Chemical lasers and High power Laser. SPIE, 1998. pp. 67-73 (Proceedings of SPIE).
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abstract = "An ArF excimer laser has been operated using four different spiker-sustainer excitation circuits. We report on the large differences in the laser output energy caused by nanosecond- scale variations in the preionization timing with each circuit.",
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Feenstra, L, Hoekstra, OB, Witteman, WJ & Peters, PJM 1998, On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits. in XII International Symposium Gas Flow and Chemical lasers and High power Laser. Proceedings of SPIE, vol. 3574, SPIE, pp. 67-73. https://doi.org/10.1117/12.334503

On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits. / Feenstra, L.; Hoekstra, O.B.; Witteman, W.J.; Peters, P.J.M.

XII International Symposium Gas Flow and Chemical lasers and High power Laser. SPIE, 1998. p. 67-73 (Proceedings of SPIE; Vol. 3574).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T3 - Proceedings of SPIE

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Feenstra L, Hoekstra OB, Witteman WJ, Peters PJM. On the timing of the x-ray preionisation of a discharge pumped ArF excimer laser with different excitation circuits. In XII International Symposium Gas Flow and Chemical lasers and High power Laser. SPIE. 1998. p. 67-73. (Proceedings of SPIE). https://doi.org/10.1117/12.334503