DC measurements and transmission line method measurements have been carried out on field oxide NMOSTs made in a 0-8 m CMOS process. Analysis shows that DC measurements can be applied for fast ESD related feedback to submicron process development.
- ESD Semiconductor devices
- ESD modelling
- Transmission line method
- Second breakdown
Luchies, J. R. M., Luchies, J. M., Kuper, F. G., Verweij, J. F., & Verweij, J. (1993). On the use of DC measurements for ESD-related process monitoring. Quality and reliability engineering international, 9(4), 309-313. https://doi.org/10.1002/qre.4680090412