On the use of DC measurements for ESD related process monitoring

J.R.M. Luchies; F.G. Kuper; J.F. Verweij

On the use of DC measurements for ESD related process monitoring

J.R.M. Luchies
, F.G. Kuper
, J.F. Verweij

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings 3rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 92
Place of Publication	Schwabisch Gmund, Germany
Pages	69-72
Number of pages	0
Publication status	Published - 5 Oct 1992

Keywords

METIS-113926

Cite this

@inproceedings{4609617048f84f9e99d62864806558a4,

title = "On the use of DC measurements for ESD related process monitoring",

keywords = "METIS-113926",

author = "J.R.M. Luchies and F.G. Kuper and J.F. Verweij",

year = "1992",

month = oct,

day = "5",

language = "Undefined",

pages = "69--72",

booktitle = "Proceedings 3rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 92",

}

On the use of DC measurements for ESD related process monitoring. / Luchies, J.R.M.; Kuper, F.G.; Verweij, J.F.
Proceedings 3rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 92. Schwabisch Gmund, Germany, 1992. p. 69-72.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - On the use of DC measurements for ESD related process monitoring

AU - Luchies, J.R.M.

AU - Kuper, F.G.

AU - Verweij, J.F.

PY - 1992/10/5

Y1 - 1992/10/5

KW - METIS-113926

M3 - Conference contribution

SP - 69

EP - 72

BT - Proceedings 3rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 92

CY - Schwabisch Gmund, Germany

ER -