Original language | Undefined |
---|---|
Title of host publication | Microstructures and Microfabricated systems II, Editors: D. Denton, P.J. Hesketh, H. Hughes, vol. 95-27 |
Place of Publication | Pennington, New Jersey, USA |
Publisher | Electrochemical Society |
Pages | 24-32 |
ISBN (Print) | 1-56677-123-4 |
Publication status | Published - 1995 |
Keywords
- METIS-112529