| Original language | Undefined |
|---|---|
| Title of host publication | Microstructures and Microfabricated systems II, Editors: D. Denton, P.J. Hesketh, H. Hughes, vol. 95-27 |
| Place of Publication | Pennington, New Jersey, USA |
| Publisher | Electrochemical Society |
| Pages | 24-32 |
| ISBN (Print) | 1-56677-123-4 |
| Publication status | Published - 1995 |
Keywords
- METIS-112529
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