| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the second International symposium on Microstructures and Microfabricated systems II, vol 95-2 |
| Place of Publication | Chicago, Illinois, USA |
| Pages | 1476-1477 |
| Publication status | Published - 8 Oct 1995 |
Keywords
- METIS-113776
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