Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

A. Boogaard, Alexeij Y. Kovalgin, I. Brunets, J. Holleman, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    10 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD'. Together they form a unique fingerprint.