Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing

D. Scorticati, A. Illiberi, G.R.B.E. Römer, T. Bor, W. Ogieglo, M. Klein Gunnewiek, A. Lenferink, C. Otto, J.Z.P. Skolski, F. Grob, D.F. de Lange, A.J. Huis in 't Veld

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Abstract

Ultra-short pulsed laser sources, with pulse durations in the ps and fs regime, are commonly exploited for cold ablation. However, operating ultra-short pulsed laser sources at fluence levels well below the ablation threshold allows for fast and selective thermal processing. The latter is especially advantageous for the processing of thin films. A precise control of the heat affected zone, as small as tens of nanometers, depending on the material and laser conditions, can be achieved. It enables the treatment of the upper section of thin films with negligible effects on the bulk of the film and no thermal damage of sensitive substrates below. By applying picosecond laser pulses, the optical and electrical properties of 900 nm thick SnO2 films, grown by an industrial CVD process on borofloat®-glass, were modified. The treated films showed a higher transmittance of light in the visible and near infra-red range, as well as a slightly increased electrical sheet resistance. Changes in optical properties are attributed to thermal annealing, as well as to the occurrence of Laser-Induced Periodic Surface Structures (LIPSSs) superimposed on the surface of the SnO2 film. The small increase of electrical resistance is attributed to the generation of laser induced defects introduced during the fast heating-quenching cycle of the film. These results can be used to further improve the performance of SnO2-based electrodes for solar cells and/or electronic devices.
Original languageEnglish
Title of host publicationLaser material processing for solar energy devices II
EditorsEdward W. Reutzel
Place of PublicationSan Diego, CA, USA
PublisherSPIE
Pages1-12
Number of pages12
DOIs
Publication statusPublished - 25 Aug 2013
EventLaser Materials Processing for Solar Energy Devices II - San Diego, United States
Duration: 25 Aug 201329 Aug 2013

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X

Conference

ConferenceLaser Materials Processing for Solar Energy Devices II
CountryUnited States
CitySan Diego
Period25/08/1329/08/13

Fingerprint

ultrashort pulsed lasers
laser annealing
electrical properties
optical properties
thin films
ablation
lasers
heat affected zone
thick films
transmittance
fluence
pulse duration
solar cells
quenching
vapor deposition
occurrences
damage
cycles
annealing
heating

Keywords

  • METIS-298440
  • IR-87368

Cite this

Scorticati, D., Illiberi, A., Römer, G. R. B. E., Bor, T., Ogieglo, W., Klein Gunnewiek, M., ... Huis in 't Veld, A. J. (2013). Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing. In E. W. Reutzel (Ed.), Laser material processing for solar energy devices II (pp. 1-12). (Proceedings of SPIE). San Diego, CA, USA: SPIE. https://doi.org/10.1117/12.2023635
Scorticati, D. ; Illiberi, A. ; Römer, G.R.B.E. ; Bor, T. ; Ogieglo, W. ; Klein Gunnewiek, M. ; Lenferink, A. ; Otto, C. ; Skolski, J.Z.P. ; Grob, F. ; de Lange, D.F. ; Huis in 't Veld, A.J. / Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing. Laser material processing for solar energy devices II. editor / Edward W. Reutzel. San Diego, CA, USA : SPIE, 2013. pp. 1-12 (Proceedings of SPIE).
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title = "Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing",
abstract = "Ultra-short pulsed laser sources, with pulse durations in the ps and fs regime, are commonly exploited for cold ablation. However, operating ultra-short pulsed laser sources at fluence levels well below the ablation threshold allows for fast and selective thermal processing. The latter is especially advantageous for the processing of thin films. A precise control of the heat affected zone, as small as tens of nanometers, depending on the material and laser conditions, can be achieved. It enables the treatment of the upper section of thin films with negligible effects on the bulk of the film and no thermal damage of sensitive substrates below. By applying picosecond laser pulses, the optical and electrical properties of 900 nm thick SnO2 films, grown by an industrial CVD process on borofloat{\circledR}-glass, were modified. The treated films showed a higher transmittance of light in the visible and near infra-red range, as well as a slightly increased electrical sheet resistance. Changes in optical properties are attributed to thermal annealing, as well as to the occurrence of Laser-Induced Periodic Surface Structures (LIPSSs) superimposed on the surface of the SnO2 film. The small increase of electrical resistance is attributed to the generation of laser induced defects introduced during the fast heating-quenching cycle of the film. These results can be used to further improve the performance of SnO2-based electrodes for solar cells and/or electronic devices.",
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author = "D. Scorticati and A. Illiberi and G.R.B.E. R{\"o}mer and T. Bor and W. Ogieglo and {Klein Gunnewiek}, M. and A. Lenferink and C. Otto and J.Z.P. Skolski and F. Grob and {de Lange}, D.F. and {Huis in 't Veld}, A.J.",
year = "2013",
month = "8",
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doi = "10.1117/12.2023635",
language = "English",
series = "Proceedings of SPIE",
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booktitle = "Laser material processing for solar energy devices II",
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Scorticati, D, Illiberi, A, Römer, GRBE, Bor, T, Ogieglo, W, Klein Gunnewiek, M, Lenferink, A, Otto, C, Skolski, JZP, Grob, F, de Lange, DF & Huis in 't Veld, AJ 2013, Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing. in EW Reutzel (ed.), Laser material processing for solar energy devices II. Proceedings of SPIE, SPIE, San Diego, CA, USA, pp. 1-12, Laser Materials Processing for Solar Energy Devices II, San Diego, United States, 25/08/13. https://doi.org/10.1117/12.2023635

Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing. / Scorticati, D.; Illiberi, A.; Römer, G.R.B.E.; Bor, T.; Ogieglo, W.; Klein Gunnewiek, M.; Lenferink, A.; Otto, C.; Skolski, J.Z.P.; Grob, F.; de Lange, D.F.; Huis in 't Veld, A.J.

Laser material processing for solar energy devices II. ed. / Edward W. Reutzel. San Diego, CA, USA : SPIE, 2013. p. 1-12 (Proceedings of SPIE).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing

AU - Scorticati, D.

AU - Illiberi, A.

AU - Römer, G.R.B.E.

AU - Bor, T.

AU - Ogieglo, W.

AU - Klein Gunnewiek, M.

AU - Lenferink, A.

AU - Otto, C.

AU - Skolski, J.Z.P.

AU - Grob, F.

AU - de Lange, D.F.

AU - Huis in 't Veld, A.J.

PY - 2013/8/25

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N2 - Ultra-short pulsed laser sources, with pulse durations in the ps and fs regime, are commonly exploited for cold ablation. However, operating ultra-short pulsed laser sources at fluence levels well below the ablation threshold allows for fast and selective thermal processing. The latter is especially advantageous for the processing of thin films. A precise control of the heat affected zone, as small as tens of nanometers, depending on the material and laser conditions, can be achieved. It enables the treatment of the upper section of thin films with negligible effects on the bulk of the film and no thermal damage of sensitive substrates below. By applying picosecond laser pulses, the optical and electrical properties of 900 nm thick SnO2 films, grown by an industrial CVD process on borofloat®-glass, were modified. The treated films showed a higher transmittance of light in the visible and near infra-red range, as well as a slightly increased electrical sheet resistance. Changes in optical properties are attributed to thermal annealing, as well as to the occurrence of Laser-Induced Periodic Surface Structures (LIPSSs) superimposed on the surface of the SnO2 film. The small increase of electrical resistance is attributed to the generation of laser induced defects introduced during the fast heating-quenching cycle of the film. These results can be used to further improve the performance of SnO2-based electrodes for solar cells and/or electronic devices.

AB - Ultra-short pulsed laser sources, with pulse durations in the ps and fs regime, are commonly exploited for cold ablation. However, operating ultra-short pulsed laser sources at fluence levels well below the ablation threshold allows for fast and selective thermal processing. The latter is especially advantageous for the processing of thin films. A precise control of the heat affected zone, as small as tens of nanometers, depending on the material and laser conditions, can be achieved. It enables the treatment of the upper section of thin films with negligible effects on the bulk of the film and no thermal damage of sensitive substrates below. By applying picosecond laser pulses, the optical and electrical properties of 900 nm thick SnO2 films, grown by an industrial CVD process on borofloat®-glass, were modified. The treated films showed a higher transmittance of light in the visible and near infra-red range, as well as a slightly increased electrical sheet resistance. Changes in optical properties are attributed to thermal annealing, as well as to the occurrence of Laser-Induced Periodic Surface Structures (LIPSSs) superimposed on the surface of the SnO2 film. The small increase of electrical resistance is attributed to the generation of laser induced defects introduced during the fast heating-quenching cycle of the film. These results can be used to further improve the performance of SnO2-based electrodes for solar cells and/or electronic devices.

KW - METIS-298440

KW - IR-87368

U2 - 10.1117/12.2023635

DO - 10.1117/12.2023635

M3 - Conference contribution

T3 - Proceedings of SPIE

SP - 1

EP - 12

BT - Laser material processing for solar energy devices II

A2 - Reutzel, Edward W.

PB - SPIE

CY - San Diego, CA, USA

ER -

Scorticati D, Illiberi A, Römer GRBE, Bor T, Ogieglo W, Klein Gunnewiek M et al. Optical and electrical properties of SnO2 thin films after ultra-short pulsed laser annealing. In Reutzel EW, editor, Laser material processing for solar energy devices II. San Diego, CA, USA: SPIE. 2013. p. 1-12. (Proceedings of SPIE). https://doi.org/10.1117/12.2023635