Abstract
A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.
Original language | English |
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Pages (from-to) | 94-101 |
Number of pages | 8 |
Journal | Thin solid films |
Volume | 680 |
Early online date | 25 Apr 2019 |
DOIs | |
Publication status | Published - 30 Jun 2019 |
Keywords
- Extreme ultraviolet reflectometry
- Optical constants
- Orthorhombic LaLuO
- Thin films characterization
- 22/4 OA procedure