Abstract
A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.
| Original language | English |
|---|---|
| Pages (from-to) | 94-101 |
| Number of pages | 8 |
| Journal | Thin solid films |
| Volume | 680 |
| Early online date | 25 Apr 2019 |
| DOIs | |
| Publication status | Published - 30 Jun 2019 |
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Keywords
- Extreme ultraviolet reflectometry
- Optical constants
- Orthorhombic LaLuO
- Thin films characterization
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Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry. / Tryus, Maksym; Nikolaev, Konstantin V.; Makhotkin, Igor A.; Schubert, Jürgen; Kibkalo, Lidia; Danylyuk, Serhiy; Giglia, Angelo; Nicolosi, Piergiorgio; Juschkin, Larissa.
In: Thin solid films, Vol. 680, 30.06.2019, p. 94-101.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry
AU - Tryus, Maksym
AU - Nikolaev, Konstantin V.
AU - Makhotkin, Igor A.
AU - Schubert, Jürgen
AU - Kibkalo, Lidia
AU - Danylyuk, Serhiy
AU - Giglia, Angelo
AU - Nicolosi, Piergiorgio
AU - Juschkin, Larissa
PY - 2019/6/30
Y1 - 2019/6/30
N2 - A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.
AB - A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.
KW - Extreme ultraviolet reflectometry
KW - Optical constants
KW - Orthorhombic LaLuO
KW - Thin films characterization
UR - http://www.scopus.com/inward/record.url?scp=85064819744&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2019.04.037
DO - 10.1016/j.tsf.2019.04.037
M3 - Article
AN - SCOPUS:85064819744
VL - 680
SP - 94
EP - 101
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -