Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

Maksym Tryus, Konstantin V. Nikolaev, Igor A. Makhotkin, Jürgen Schubert, Lidia Kibkalo, Serhiy Danylyuk, Angelo Giglia, Piergiorgio Nicolosi, Larissa Juschkin

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.

Original languageEnglish
Pages (from-to)94-101
Number of pages8
JournalThin solid films
Volume680
Early online date25 Apr 2019
DOIs
Publication statusPublished - 30 Jun 2019

Fingerprint

Optical constants
error analysis
Pulsed laser deposition
Stoichiometry
Error analysis
pulsed laser deposition
stoichiometry
atomic force microscopy
Transmission electron microscopy
reflectance
transmission electron microscopy
Substrates
curves
strontium titanium oxide

Keywords

  • Extreme ultraviolet reflectometry
  • Optical constants
  • Orthorhombic LaLuO
  • Thin films characterization

Cite this

Tryus, Maksym ; Nikolaev, Konstantin V. ; Makhotkin, Igor A. ; Schubert, Jürgen ; Kibkalo, Lidia ; Danylyuk, Serhiy ; Giglia, Angelo ; Nicolosi, Piergiorgio ; Juschkin, Larissa. / Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry. In: Thin solid films. 2019 ; Vol. 680. pp. 94-101.
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abstract = "A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.",
keywords = "Extreme ultraviolet reflectometry, Optical constants, Orthorhombic LaLuO, Thin films characterization",
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Tryus, M, Nikolaev, KV, Makhotkin, IA, Schubert, J, Kibkalo, L, Danylyuk, S, Giglia, A, Nicolosi, P & Juschkin, L 2019, 'Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry' Thin solid films, vol. 680, pp. 94-101. https://doi.org/10.1016/j.tsf.2019.04.037

Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry. / Tryus, Maksym; Nikolaev, Konstantin V.; Makhotkin, Igor A.; Schubert, Jürgen; Kibkalo, Lidia; Danylyuk, Serhiy; Giglia, Angelo; Nicolosi, Piergiorgio; Juschkin, Larissa.

In: Thin solid films, Vol. 680, 30.06.2019, p. 94-101.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry

AU - Tryus, Maksym

AU - Nikolaev, Konstantin V.

AU - Makhotkin, Igor A.

AU - Schubert, Jürgen

AU - Kibkalo, Lidia

AU - Danylyuk, Serhiy

AU - Giglia, Angelo

AU - Nicolosi, Piergiorgio

AU - Juschkin, Larissa

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AB - A thin orthorhombic LaLuO3 film, grown on SrTiO3 substrate by pulsed laser deposition, is characterized using multi-angle spectral extreme ultraviolet reflectometry (EUVR). Layer structure parameters and optical constants of LaLuO3 are determined simultaneously by fitting angular reflectivity curves in a wide spectral range (70–200 eV). From near-edge optical constant analysis, La:Lu stoichiometry ratio and the film density are derived. Sample structure is additionally analyzed using XRR, AFM and TEM methods. EUVR as a method of structural characterization is discussed in comparison with XRR. Correlation error analysis of the layer structure parameters, obtained from independent EUVR and XRR fits, is presented.

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