Optical device comprising a cantilever and method of fabrication and use thereof

Davide Iannuzzi; Szabolcs Deladi; Michael Curt Elwenspoek

Optical device comprising a cantilever and method of fabrication and use thereof

Davide Iannuzzi (Inventor), Szabolcs Deladi (Inventor), Michael Curt Elwenspoek (Inventor)

Research output: Patent

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Abstract

The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; using the light source to send a beam of light into the optical fiber; measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

Original language	English
Patent number	US7916306
Priority date	29/03/11
Publication status	Accepted/In press - 29 Mar 2011

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title = "Optical device comprising a cantilever and method of fabrication and use thereof",

abstract = "The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; using the light source to send a beam of light into the optical fiber; measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.",

author = "Davide Iannuzzi and Szabolcs Deladi and Elwenspoek, {Michael Curt}",

note = "US 2009/0002714 A1; US7916306",

year = "2011",

month = mar,

day = "29",

language = "English",

type = "Patent",

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TY - PAT

T1 - Optical device comprising a cantilever and method of fabrication and use thereof

AU - Iannuzzi, Davide

AU - Deladi, Szabolcs

AU - Elwenspoek, Michael Curt

N1 - US 2009/0002714 A1

PY - 2011/3/29

Y1 - 2011/3/29

N2 - The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; using the light source to send a beam of light into the optical fiber; measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

AB - The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; using the light source to send a beam of light into the optical fiber; measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

M3 - Patent

M1 - US7916306

ER -