Optical device comprising a cantilever and method of fabrication and use thereof

Davide Iannuzzi (Inventor), S. Deladi (Inventor), Michael Curt Elwenspoek (Inventor)

    Research output: Patent

    19 Downloads (Pure)

    Abstract

    The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; using the light source to send a beam of light into the optical fiber; measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.
    Original languageUndefined
    Patent numberUS7916306
    Priority date29/03/11
    Publication statusAccepted/In press - 29 Mar 2011

    Keywords

    • METIS-277626
    • IR-76934
    • EWI-20132

    Cite this

    Iannuzzi, D., Deladi, S., & Elwenspoek, M. C. (Accepted/In press). Optical device comprising a cantilever and method of fabrication and use thereof. (Patent No. US7916306).