Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device

Roman Klein; Frank Stietz; Marco Wedowski; Eric Louis; Frederik Bijkerk; Andrey E Yakshin; Yakshin Andrey E Klein Roman,stietz Frank,wedowski Marco,louis Eric,bijkerk Frederik

Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device

Roman Klein (Inventor), Frank Stietz (Inventor), Marco Wedowski (Inventor), Eric Louis (Inventor), Frederik Bijkerk (Inventor), Andrey E Yakshin (Inventor), Yakshin Andrey E Klein Roman,stietz Frank,wedowski Marco,louis Eric,bijkerk Frederik (Inventor)

Research output: Patent

Original language	English
Patent number	CN1565035
IPC	H01L 21/ 027 A I
Priority date	4/10/01
Publication status	Published - 12 Jan 2005

Cite this

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title = "Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device",

author = "Roman Klein and Frank Stietz and Marco Wedowski and Eric Louis and Frederik Bijkerk and Yakshin, {Andrey E} and {Klein Roman,stietz Frank,wedowski Marco,louis Eric,bijkerk Frederik}, {Yakshin Andrey E}",

year = "2005",

month = jan,

day = "12",

language = "English",

type = "Patent",

note = "CN1565035; H01L 21/ 027 A I",

}

TY - PAT

T1 - Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device

AU - Klein, Roman

AU - Stietz, Frank

AU - Wedowski, Marco

AU - Louis, Eric

AU - Bijkerk, Frederik

AU - Yakshin, Andrey E

AU - Klein Roman,stietz Frank,wedowski Marco,louis Eric,bijkerk Frederik, Yakshin Andrey E

PY - 2005/1/12

Y1 - 2005/1/12

M3 - Patent

M1 - CN1565035

ER -