Optical Excitation of Micro-Mechanical Resonators

Theo S.J. Lammerink; Miko Elwenspoek; Jan H.J. Fluitman

doi:10.1109/MEMSYS.1991.114788

Optical Excitation of Micro-Mechanical Resonators

Theo S.J. Lammerink, Miko Elwenspoek, Jan H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material ¿, the penetration depth of a thermal wave ¿, and the thickness of the resonator. ¿ is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory

Original language	English
Title of host publication	Proceedings IEEE Micro Electro Mechanical Systems, MEMS '91
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	160-165
Number of pages	6
ISBN (Print)	9780879426415
DOIs	https://doi.org/10.1109/MEMSYS.1991.114788
Publication status	Published - 30 Jan 1991
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991 - Nara, Japan Duration: 30 Jan 1991 → 2 Feb 1991

Conference

Conference	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991
Abbreviated title	MEMS
Country/Territory	Japan
City	Nara
Period	30/01/91 → 2/02/91

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10.1109/MEMSYS.1991.114788

Lammerink1991opticalFinal published version, 290 KB

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title = "Optical Excitation of Micro-Mechanical Resonators",

abstract = "The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material ¿, the penetration depth of a thermal wave ¿, and the thickness of the resonator. ¿ is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory",

author = "Lammerink, {Theo S.J.} and Miko Elwenspoek and Fluitman, {Jan H.J.}",

year = "1991",

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doi = "10.1109/MEMSYS.1991.114788",

language = "English",

isbn = "9780879426415",

pages = "160--165",

booktitle = "Proceedings IEEE Micro Electro Mechanical Systems, MEMS '91",

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note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991, MEMS ; Conference date: 30-01-1991 Through 02-02-1991",

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TY - GEN

T1 - Optical Excitation of Micro-Mechanical Resonators

AU - Lammerink, Theo S.J.

AU - Elwenspoek, Miko

AU - Fluitman, Jan H.J.

PY - 1991/1/30

Y1 - 1991/1/30

N2 - The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material ¿, the penetration depth of a thermal wave ¿, and the thickness of the resonator. ¿ is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory

AB - The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material ¿, the penetration depth of a thermal wave ¿, and the thickness of the resonator. ¿ is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory

U2 - 10.1109/MEMSYS.1991.114788

DO - 10.1109/MEMSYS.1991.114788

M3 - Conference contribution

SN - 9780879426415

SP - 160

EP - 165

BT - Proceedings IEEE Micro Electro Mechanical Systems, MEMS '91

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991

Y2 - 30 January 1991 through 2 February 1991

ER -

Optical Excitation of Micro-Mechanical Resonators

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