Optical Excitation of Micro-Mechanical Resonators

Theo S.J. Lammerink, Miko Elwenspoek, Jan H.J. Fluitman

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    The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material ¿, the penetration depth of a thermal wave ¿, and the thickness of the resonator. ¿ is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory
    Original languageEnglish
    Title of host publicationProceedings IEEE Micro Electro Mechanical Systems, MEMS '91
    Place of PublicationPiscataway, NJ
    Number of pages6
    ISBN (Print)9780879426415
    Publication statusPublished - 30 Jan 1991
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991 - Nara, Japan
    Duration: 30 Jan 19912 Feb 1991


    ConferenceIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1991
    Abbreviated titleMEMS


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