Optical excitation of micromechanical resonators

T.S.J. Lammerink, M. Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 14 Jun 1991
    EventMESA Dag 1991 - Enschede, Netherlands
    Duration: 14 Jun 199114 Jun 1991

    Conference

    ConferenceMESA Dag 1991
    Country/TerritoryNetherlands
    CityEnschede
    Period14/06/9114/06/91
    Other(MESA Day/Meeting)

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