Optical measurement of a micro coriolis mass flow sensor

L. Kristiansen, A. Mehendale, Dannis Michel Brouwer, J.M. Zwikker, M.E. Klein

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Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in the measurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hr using a laser vibrometer. Equipped with an integrated capacitive [3] readout the measurement uncertainty amounted to 2% of the full scale range. We demonstrate a down-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.
Original languageUndefined
Title of host publicationProceedings of the 9th Euspen International Conference 2009
Place of PublicationSan Sebastian, Spain
Publication statusPublished - 2 Jun 2009
Event9th EUSPEN International Conference 2009 - Kursaal Congress Centre, San Sebastian, Spain
Duration: 2 May 20095 May 2009
Conference number: 9

Publication series



Conference9th EUSPEN International Conference 2009
Abbreviated titleEUSPEN
CitySan Sebastian


  • IR-89591
  • METIS-257956

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