Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in the measurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hr using a laser vibrometer. Equipped with an integrated capacitive  readout the measurement uncertainty amounted to 2% of the full scale range. We demonstrate a down-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.
|Title of host publication||Proceedings of the 9th Euspen International Conference 2009|
|Place of Publication||San Sebastian, Spain|
|Publication status||Published - 2 Jun 2009|
|Event||9th EUSPEN International Conference 2009 - Kursaal Congress Centre, San Sebastian, Spain|
Duration: 2 May 2009 → 5 May 2009
Conference number: 9
|Conference||9th EUSPEN International Conference 2009|
|Period||2/05/09 → 5/05/09|
Kristiansen, L., Mehendale, A., Brouwer, D. M., Zwikker, J. M., & Klein, M. E. (2009). Optical measurement of a micro coriolis mass flow sensor. In Proceedings of the 9th Euspen International Conference 2009 (pp. 328-332). San Sebastian, Spain.