Optical measurement of a micro coriolis mass flow sensor

L. Kristiansen; A. Mehendale; Dannis Michel Brouwer; J.M. Zwikker; M.E. Klein

Optical measurement of a micro coriolis mass flow sensor

L. Kristiansen
, A. Mehendale
, Dannis Michel Brouwer
, J.M. Zwikker
, M.E. Klein

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

264 Downloads (Pure)

Abstract

Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in the measurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hr using a laser vibrometer. Equipped with an integrated capacitive [3] readout the measurement uncertainty amounted to 2% of the full scale range. We demonstrate a down-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.

Original language	Undefined
Title of host publication	Proceedings of the 9th Euspen International Conference 2009
Place of Publication	San Sebastian, Spain
Pages	328-332
Publication status	Published - 2 Jun 2009
Event	9th EUSPEN International Conference 2009 - Kursaal Congress Centre, San Sebastian, Spain Duration: 2 May 2009 → 5 May 2009 Conference number: 9

Publication series

Name
Volume	I.

Conference

Conference	9th EUSPEN International Conference 2009
Abbreviated title	EUSPEN
Country/Territory	Spain
City	San Sebastian
Period	2/05/09 → 5/05/09

Keywords

IR-89591
METIS-257956

Access to Document

P4.30_Brouwer

Cite this

@inproceedings{089897065609420aad3b356493931918,

title = "Optical measurement of a micro coriolis mass flow sensor",

abstract = "Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in the measurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hr using a laser vibrometer. Equipped with an integrated capacitive [3] readout the measurement uncertainty amounted to 2\% of the full scale range. We demonstrate a down-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.",

keywords = "IR-89591, METIS-257956",

author = "L. Kristiansen and A. Mehendale and Brouwer, \{Dannis Michel\} and J.M. Zwikker and M.E. Klein",

year = "2009",

month = jun,

day = "2",

language = "Undefined",

isbn = "0-9553082-6-0",

pages = "328--332",

booktitle = "Proceedings of the 9th Euspen International Conference 2009",

note = "9th EUSPEN International Conference 2009 ; Conference date: 02-05-2009 Through 05-05-2009",

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TY - GEN

T1 - Optical measurement of a micro coriolis mass flow sensor

AU - Kristiansen, L.

AU - Mehendale, A.

AU - Brouwer, Dannis Michel

AU - Zwikker, J.M.

AU - Klein, M.E.

N1 - Conference code: 9

PY - 2009/6/2

Y1 - 2009/6/2

N2 - Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in the measurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hr using a laser vibrometer. Equipped with an integrated capacitive [3] readout the measurement uncertainty amounted to 2% of the full scale range. We demonstrate a down-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.

AB - Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in the measurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hr using a laser vibrometer. Equipped with an integrated capacitive [3] readout the measurement uncertainty amounted to 2% of the full scale range. We demonstrate a down-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.

KW - IR-89591

KW - METIS-257956

M3 - Conference contribution

SN - 0-9553082-6-0

SP - 328

EP - 332

BT - Proceedings of the 9th Euspen International Conference 2009

CY - San Sebastian, Spain

T2 - 9th EUSPEN International Conference 2009

Y2 - 2 May 2009 through 5 May 2009

ER -