Optical operation of micro-mechanical resonator sensors

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageEnglish
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Fluitman, J.H.J., Supervisor
    • Elwenspoek, M., Advisor
    Award date14 Dec 1990
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9003947-3
    Publication statusPublished - 14 Dec 1990

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