Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3

F. Ay; J. Bradley; Kerstin Worhoff; R.M. de Ridder; Markus Pollnau

doi:10.1109/CLEOE-EQEC.2009.5191501

Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al₂O₃

F. Ay, J. Bradley, Kerstin Worhoff, R.M. de Ridder, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

149 Downloads (Pure)

Abstract

Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.

Original language	Undefined
Title of host publication	Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
Place of Publication	Piscataway
Publisher	IEEE
Pages	CK.P.1 MON
Number of pages	1
ISBN (Print)	978-1-4244-4079-5
DOIs	https://doi.org/10.1109/CLEOE-EQEC.2009.5191501 https://doi.org/10.1109/CLEOE-EQEC.2009.5191501 - CK.P.1 MON
Publication status	Published - 7 Aug 2009
Event	11th European Quantum Electronics Conference, EQEC 2009 - Munich, Germany Duration: 14 Jun 2009 → 19 Jun 2009 Conference number: 11 http://2009.cleoeurope.org/

Publication series

Name
Publisher	IEEE Computer Society Press

Conference

Conference	11th European Quantum Electronics Conference, EQEC 2009
Abbreviated title	EQEC 2009
Country/Territory	Germany
City	Munich
Period	14/06/09 → 19/06/09
Internet address	http://2009.cleoeurope.org/

Keywords

METIS-265810
IOMS-APD: Active Photonic Devices
EWI-17479
IR-69968

Access to Document

Cite this

Ay, F., Bradley, J., Worhoff, K., de Ridder, R. M., & Pollnau, M. (2009). Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al₂O₃. In Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on (pp. CK.P.1 MON). IEEE. https://doi.org/10.1109/CLEOE-EQEC.2009.5191501, https://doi.org/10.1109/CLEOE-EQEC.2009.5191501 - CK.P.1 MON

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title = "Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3",

abstract = "Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.",

keywords = "METIS-265810, IOMS-APD: Active Photonic Devices, EWI-17479, IR-69968",

author = "F. Ay and J. Bradley and Kerstin Worhoff and {de Ridder}, R.M. and Markus Pollnau",

note = "10.1109/CLEOE-EQEC.2009.5191501 - CK.P.1 MON ; 11th European Quantum Electronics Conference, EQEC 2009 ; Conference date: 14-06-2009 Through 19-06-2009",

year = "2009",

month = aug,

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doi = "10.1109/CLEOE-EQEC.2009.5191501",

language = "Undefined",

isbn = "978-1-4244-4079-5",

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Ay, F, Bradley, J, Worhoff, K, de Ridder, RM & Pollnau, M 2009, Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al₂O₃. in Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on. IEEE, Piscataway, pp. CK.P.1 MON, 11th European Quantum Electronics Conference, EQEC 2009, Munich, Bavaria, Germany, 14/06/09. https://doi.org/10.1109/CLEOE-EQEC.2009.5191501, https://doi.org/10.1109/CLEOE-EQEC.2009.5191501 - CK.P.1 MON

Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al₂O₃. / Ay, F.; Bradley, J.; Worhoff, Kerstin et al.
Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on. Piscataway: IEEE, 2009. p. CK.P.1 MON.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3

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AU - Pollnau, Markus

N1 - Conference code: 11

PY - 2009/8/7

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N2 - Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.

AB - Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.

KW - METIS-265810

KW - IOMS-APD: Active Photonic Devices

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DO - 10.1109/CLEOE-EQEC.2009.5191501

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BT - Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on

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Ay F, Bradley J, Worhoff K, de Ridder RM, Pollnau M. Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al₂O₃. In Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on. Piscataway: IEEE. 2009. p. CK.P.1 MON doi: 10.1109/CLEOE-EQEC.2009.5191501, 10.1109/CLEOE-EQEC.2009.5191501 - CK.P.1 MON