Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3

F. Ay, J. Bradley, Kerstin Worhoff, R.M. de Ridder, Markus Pollnau

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
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    Abstract

    Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.
    Original languageUndefined
    Title of host publicationLasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    PagesCK.P.1 MON
    Number of pages1
    ISBN (Print)978-1-4244-4079-5
    DOIs
    Publication statusPublished - 7 Aug 2009
    Event11th European Quantum Electronics Conference, EQEC 2009 - Munich, Germany
    Duration: 14 Jun 200919 Jun 2009
    Conference number: 11
    http://2009.cleoeurope.org/

    Publication series

    Name
    PublisherIEEE Computer Society Press

    Conference

    Conference11th European Quantum Electronics Conference, EQEC 2009
    Abbreviated titleEQEC 2009
    CountryGermany
    CityMunich
    Period14/06/0919/06/09
    Internet address

    Keywords

    • METIS-265810
    • IOMS-APD: Active Photonic Devices
    • EWI-17479
    • IR-69968

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