Optical performance of B-layer ultra-shallow-junction silicon photodiodes in the VUV spectral range

L. Shi*, F. Sarubbi, L. K. Nanver, U. Kroth, A. Gottwald, S. Nihtianov

*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

31 Citations (Scopus)
17 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Optical performance of B-layer ultra-shallow-junction silicon photodiodes in the VUV spectral range'. Together they form a unique fingerprint.

Engineering

Physics