Optical properties of PbTiO₃, PbZr_xTi_1-xO₃, and PbZrO₃ films deposited by metalorganic chemical vapor on SrTiO₃

Epitaxial PZT films have been prepared by metalorganic chemical vapor deposition on SrTiO3 substrates. Two sets of films of thicknesses 50–100 and 700–1400 nm, containing 0%, 40%, 60%, and 100% Zr, were prepared and investigated. The refractive index n was determined by ellipsometry for the thin films and by reflectivity for the thicker films. Results were obtained over the energy range from 1.55 to 3.72 eV, and with a Cauchy-fit extrapolation down to 0.62 eV. The refractive-index curves show a systematic variation with composition. For all compositions, n is close to 3.2 at 3.72 eV (333 nm), while at 1.55 eV (800 nm) n is 2.35 for PZ and 2.61 for PT. In agreement with previous results we find that the optical band gap is essentially independent of composition for PZT. We obtained 3.660.1 eV. The n(E) results were analyzed by a Wemple–DiDomenico dispersion analysis, yielding results for the dispersion region in the ultraviolet. Unlike the band gap, which is insensitive to composition in PZT, the dispersion energy Ed decreases from PT to PZ in the same fashion as the refractive index in the transparent region.